Miniaturized time-scanning Fourier transform spectrometer based on silicon technology
نویسندگان
چکیده
منابع مشابه
Miniaturized time-scanning Fourier transform spectrometer based on silicon technology.
We present a miniaturized Fourier transform spectrometer (FTS) based on optical microelectromechanical system technology. The FTS is a Michelson interferometer with one scanning mirror. A new type of electrostatic comb drive actuator moves the mirror. We have measured a nonlinearity of the driving system of +/-0.5 mum for a displacement of 38.5 mum . A method is presented to correct the spectru...
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ژورنال
عنوان ژورنال: Optics Letters
سال: 1999
ISSN: 0146-9592,1539-4794
DOI: 10.1364/ol.24.001705